Project partners - Institutes
Centro Nacional de Microelectrónica (Spain)
Centro Nacional de Microelectrónica (CNM) is a non profit research institute of the Spanish Research Council (Consejo Superior de Investigaciones Científicas, CSIC) that was established in 1985 to support the Spanish and European industry and scientific community in the use of
microelectronics. Activities in silicon microsystems started in the Barcelona Microelectronics Institute (IMB) of CNM in 1989, and have included work in mechanical, chemical and radiation sensors, microactuators, microfluidics, CAD/simulation tools and CMOS-integrated sensor systems. Nanofabrication activities started in 2002. CNM-IMB has a full CMOS line for IC fabrication and laboratories for silicon micromachining and nanolithography.
The clean-room facility of IMB was awarded as a large-scale facility by the EC in year 2000. The IMB staff is about 150 people, which include a professional clean room staff of 23. In the last five years CNM-IMB has participated in 15 EU-funded R&D projects in the field of micro and nanosystems.
CNM-IMB has participated in various EU-funded projects on combining standard CMOS and microsystems technologies for the fabrication of
integrated sensors (e.g. DEMAC (coordinated by CNM) and BARMINT projects), and on combining CMOS and nanostructures (e.g. NANOMASS and BIOFINGER
(coordinated by CNM) projects). An important know-how has been acquired on the integration of micro and nanostructures on a CMOS technology.
This know-how would be used in the HySYS project to study the integration between the sensitive parts (metal nanostructures) and the signal parts
(CMOS circuits) of the hydrogen safety sensor (WP 3300).