Project partners - Universities
The Microsystems Laboratory is part of the Engineering Science and Technology Faculty at EPFL. Our research is devoted to the engineering of structures
at the mesoscopic length scale (micro to nano) by combining top-down’ engineering methods with ‘bottom-up’ self-assembly. Our laboratory's
main expertise is the application of silicon based technology to the frontier between micrometer and nanometer scale for application as
sensor microsystems (MEMS) with nanoscale components. We can rely on world-class cleanroom facilities at EPFL's Center of Micro/Nanotechnology
(CMI) with specialized equipment for advanced MEMS processing. We are active member in the Network of Excellences “N2L” and "Phantoms",
and we are subproject lead partner in the IP “Napa: Emerging nanopatterning methods”. WEB site: http://lmis1.epfl.ch/; http://cmi.epfl.ch
One example of relevance for this project is the use of lithography-based template formation suitable for the nanosensors for hydrogen detection.
We plan in particular to use newly available replication methods (such as nanostencil and/or nanoimprint lithography) combined with the self-assembly
of meso/nanosructures. We already demonstrated that this technique can be scaled-up to wafer level, thus decreasing manufacturing costs.
In the proposed project we will provide the basic microsystems fabrication and nanoscale technology and develop the technology for the low-cost
mass-manufacturing of hydrogen detection sensors for the project. Finally, we will work in close collaboration with our partners responsible for
the integration of the sensors with electronics, and transfer the relevant processing knowhow, therefore enabling the scaling-up of the manufacturing processes.